Cercetări experimentale privind obţinerea peliculelor de oxizi pe suprafeţele semiconductoare cu aplicarea plasmei [Articol]
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Date
2015
Journal Title
Journal ISSN
Volume Title
Publisher
USARB
Abstract
The paper presents the results of experimental investigations aimed at the formation of thin oxide films on semiconductor surfaces by plasma applying. The morphology of obtained films depending on the electrode base material is examined. A special interest presents clusters formed on the semiconductor surfaces after processing, which highlights new properties that differ from the properties of the separate molecules and of the base material.
Description
Keywords
discharge, impulse, cluster, plasmă, impuls, atomi, molecule, semiconductoare
Citation
Cercetări experimentale privind obţinerea peliculelor de oxizi pe suprafeţele semiconductoare cu aplicarea plasmei / Pavel Topală, Vladislav Rusnac, Dorin Guzgan, Alexandr Ojegov // Tradiţie şi inovare în cercetarea ştiinţifică, Ediţia a 5-a : Materialele Colloquia Professorum din 10 octombrie 2014. – Bălţi. – 2015. – P. 212-217.